The large chamber can use both:
Jeol standard stage, with eucentric goniometer.
OPEA stage.
In two cases, the factory resolution is conserved: 5 nm.

OPEA STAGE.
Large chamber with specimen stage: 1453 x 289 x 302 mm, 185 Kg.
Stage for drum inspection:
Long: 300 to 600 mm.
Diameter: 10 to 120 mm.
Weight: 10 Kg.

X, Y; motor drive by servo motors with dial counters or PC control (Windows 95 or Windows NT).
Z: manual, 10 to 70 mm continuous.
Specimen exchange: swing out mechanism.

EQUIPMENT.
Working distance: 10 mm.
SE/BE detector.
EDS system.
Infrared TV camera.

EVACUATION SYSTEM.
Fully automatic sequence control. One turbo molecular pump 600l/s
One, rotary pump 16 m3/h. One rotary pump 1 m3.
Fore line trap for L-Vac mode with regeneration heater and timer built-in.

L-Vac mode: Image observable pressure range in specimen chamber is approximately 14 to 140 Pa.
H-Vac mode: 7.10^-4 Pa.

Evacuation time:
2 minutes with JEOL standard stage
10 minutes with the large stage

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