Photo CEAT:

This instrument is specially developed for the de metallurgy department of CEAT for examination of large sample:
Sample: diameter 300 mm, high 100 mm, weight 15 Kg.
Resolution: 8 nm.
Attachments: Infrared camera, EDS, BEIS, EDX, PC control.

Composition:

Gun with with ion pump: Tungsten, compatible LaB6.
Movable aperture objective
Specimen chamber size: 750 x 700 mm, 700 mm high. Weight: 1300 Kg.
Ports for air lock system... total 6 ports.
Specimen stage: motorisation of 6 axis
X: +/- 150 mm, resolution 0.5 µm.
Y: +/- 100 mm, resolution 0.5 µm.
Z: 0 to 50 mm, resolution 0.5 µm.
Z: correction for eucentricity condition: +/- 2mm, resolution 0.05 µm.
Rotation: 360° endless.
Tilting: 0 to 45°.

Combination TILT/WD:
Tilt: 13° 15° 20° 25° 30° 35° 40° 45°
WD mm: 8 9 11 13,5 16 18 44,5 60

Vacuum system:
Ion pump 20l/s for the gun, with isolation valve.
TMP: 1250 l/s.
Rotary pump: 40 m3/h.
Evacuation time (specimen chamber):
10 min / 10^-1Pa, 40 min / 10^-3 Pa.

Installation requirement:
Power: single phase, 110/220V, fluctuation +/-10%.
Water: 5l/min.
Floor space: 2100 x 1600 mm. Entrance 2000 mm, 2000mm high.
Total weight: 1800 Kg.
Floor vibration: < 2 µm, 5 Hz.
Room temperature: 20°C +/-5°, humidity: < 60%.
Stray AC magnetic field: < 0.3 µT.